Silicon Microstructures, Inc. (SMI) SM923x Series Ultra-Low Gauge Pressure Sensors

Silicon Microstructures, Inc. (SMI) SM923x Series Ultra-Low Gauge Pressure Sensors offer state-of-the-art MEMS pressure transducer technology and CMOS mixed signal processing technology. The sensors produce a digital, fully conditioned, multi-order pressure and temperature compensated sensor in JEDEC standard SOIC-16 package with a dual vertical porting option. The total accuracy after board mount and system level autozero is less than 1%FS. Combining the pressure sensor with a signal-conditioning ASIC in a single package simplifies the use of advanced silicon micro-machined pressure sensors. The pressure sensor can be mounted directly on a standard printed circuit board and a high level, calibrated pressure signal can be acquired from the digital interface. This eliminates the need for additional circuitry, such as a compensation network or microcontroller containing a custom correction algorithm.